Parallel spectroscopic ellipsometry for ultra-fast thin film characterization
نویسندگان
چکیده
منابع مشابه
Real-time characterization of ultra-thin organic layers via simultaneous spectroscopic ellipsometry and piezoelectric nanogravimetry
ii Acknowledgements iii Table of
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ژورنال
عنوان ژورنال: Optics Express
سال: 2020
ISSN: 1094-4087
DOI: 10.1364/oe.28.009288